Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method to detect wafer arcing in semiconductor manufacturing equipment

Method to detect wafer arcing in semiconductor manufacturing equipment

US Patent 9508612 · Granted Nov 29, 2016

Estimated economic value: $13,456,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Large format container2025
Method and system for detecting anomalies in a semiconductor processing system2025
Advanced temperature monitoring system and methods for semiconductor manufacture2024
Lighting control system and method2023
Method and system for balancing the electrostatic chucking force on a substrate2020
System to detect wafer arcing in semiconductor manufacturing equipment2019
System to detect wafer arcing in semiconductor manufacturing equipment2019
System to detect wafer arcing in semiconductor manufacturing equipment2019
System to detect wafer arcing in semiconductor manufacturing equipment2019
Lighting system and method for PWM adjustable current control2018
Apparatus and method for integrating manual and automated techniques for automat2017
Systems and methods for dynamic data masking2016