Method and system for detecting anomalies in a semiconductor processing system

Assignee

• Applied Materials

Inventors

• Ryan T. DOWNEY (5 patents)
• Hemant P. Mungekar (20 patents)
• James L'HEUREUX (10 patents)
• Andreas Neuber (12 patents)
• Michael W. Johnson (91 patents)
• Joseph A. VAN GOMPEL (3 patents)
• Gino Gerardo CRISPIERI (1 patents)
• Tony H. Tong (4 patents)
• Maxime Cayer (5 patents)
• John L. KOENIG (2 patents)
• Mike M. HUANG (1 patents)

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