Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Microelectromechanical systems device package and method for producing the microelectromechanical systems device package

Microelectromechanical systems device package and method for producing the microelectromechanical systems device package

US Patent 9479138 · Granted Oct 25, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

BAW resonator with increased quality factor2022
Bulk acoustic wave resonator with a heatsink region and electrical insulator reg2022
BAW resonator and resonator arrangement2021
MEMS component having AlN and Sc and method for manufacturing a MEMS component2018
BAW component and method for manufacturing a BAW component2018
BAW component, lamination for a BAW component, and method for manufacturing a BA2017