Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11509286 | BAW resonator with increased quality factor | — | 2022-11-22 |
| 11362638 | Bulk acoustic wave resonator with a heatsink region and electrical insulator region | — | 2022-06-14 |
| 11012053 | BAW resonator and resonator arrangement | Maximilian SCHIEK, Monika Schmiedgen, Andre SCHWÖBEL | 2021-05-18 |
| 10097152 | MEMS component having AlN and Sc and method for manufacturing a MEMS component | Paul Muralt, Ramin Matloub | 2018-10-09 |
| 10079334 | BAW component and method for manufacturing a BAW component | Paul Muralt, Ramin Matloub, Thomas Metzger | 2018-09-18 |
| 9831851 | BAW component, lamination for a BAW component, and method for manufacturing a BAW component | — | 2017-11-28 |
| 9479138 | Microelectromechanical systems device package and method for producing the microelectromechanical systems device package | — | 2016-10-25 |