Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Segmented mirror apparatus for imaging and method of using the same

Segmented mirror apparatus for imaging and method of using the same

US Patent 9448343 · Granted Sep 20, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

EUV in-situ linearity calibration for TDI image sensors using test photomasks2023
Vapor as a protectant and lifetime extender in optical systems2023
Differential height measurement using interstitial mirror plate2023
Laser produced plasma light source having a target material coated on a cylindri2022
Inspection system with non-circular pupil2021
Laser produced plasma light source having a target material coated on a cylindri2021
Multi-column spacing for photomask and reticle inspection and wafer print check 2020
Array-based characterization tool2019
Methods and apparatus for polarizing reticle inspection2019
Laser produced plasma light source having a target material coated on a cylindri2018
System and method for cleaning EUV optical elements2017
Particle and chemical control using tunnel flow2017