Apparatus for generating a hollow cathode arc discharge plasma

Assignee

• Fraunhofer

Inventors

• Henry Morgner (10 patents)
• Gösta Mattausch (5 patents)
• Christoph Metzner (18 patents)
• Michael Junghähnel (5 patents)
• Rainer Labitzke (3 patents)
• Lars Klose (1 patents)
• Torsten Werner (6 patents)
• Jörg Kubusch (8 patents)

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