| 11217720 |
Method for depositing a CdTe layer on a substrate |
Christoph Metzner, Daniel Hirsch, Olaf Zywitzki, Ludwig Decker, Torsten Werner +5 more |
2022-01-04 |
| 9640369 |
Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof |
Haydn N. G. Wadley, Goesta Mattausch, Frank-Holm Roegner |
2017-05-02 |
| 9443703 |
Apparatus for generating a hollow cathode arc discharge plasma |
Gösta Mattausch, Christoph Metzner, Michael Junghähnel, Rainer Labitzke, Lars Klose +2 more |
2016-09-13 |
| 7014889 |
Process and apparatus for plasma activated depositions in a vacuum |
James F. Groves, Derek D. Hass, Haydn N. G. Wadley, Goesta Mattausch, Siegfried Schiller |
2006-03-21 |
| 6130002 |
Process for producing organically modified oxide, oxynitride or nitride layers by vacuum deposition |
Manfred Neumann, Siegfried Schiller, Nicolas Schiller, Steffen Straach |
2000-10-10 |
| 5846608 |
Process for ion-supported vacuum coating |
Manfred Neumann, Klaus Goedicke, Siegfried Schiller, Jonathan Reschke, Falk Milde +1 more |
1998-12-08 |
| 5635087 |
Apparatus for plasma-assisted high rate electron beam vaporization |
Siegfried Schiller, Manfred Neumann |
1997-06-03 |
| 4778974 |
Electron beam line evaporator |
Manfred Neumann, Siegfried Schiller, Peter Unganz |
1988-10-18 |
| 4532888 |
Electron-beam coating of very broad strips |
Manfred Neumann, Harry Forster, Gunter Jasch, Wilfried Kunack, Martin Godenschweg +1 more |
1985-08-06 |
| 4524717 |
Electron beam strip-coating apparatus |
Manfred Neumann, Siegfried Schiller, Gerhard ZeiBig, Gunter Jasch |
1985-06-25 |
