Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11217720 | Method for depositing a CdTe layer on a substrate | Christoph Metzner, Daniel Hirsch, Olaf Zywitzki, Ludwig Decker, Torsten Werner +5 more | 2022-01-04 |
| 9640369 | Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof | Haydn N. G. Wadley, Goesta Mattausch, Frank-Holm Roegner | 2017-05-02 |
| 9443703 | Apparatus for generating a hollow cathode arc discharge plasma | Gösta Mattausch, Christoph Metzner, Michael Junghähnel, Rainer Labitzke, Lars Klose +2 more | 2016-09-13 |
| 7014889 | Process and apparatus for plasma activated depositions in a vacuum | James F. Groves, Derek D. Hass, Haydn N. G. Wadley, Goesta Mattausch, Siegfried Schiller | 2006-03-21 |
| 6130002 | Process for producing organically modified oxide, oxynitride or nitride layers by vacuum deposition | Manfred Neumann, Siegfried Schiller, Nicolas Schiller, Steffen Straach | 2000-10-10 |
| 5846608 | Process for ion-supported vacuum coating | Manfred Neumann, Klaus Goedicke, Siegfried Schiller, Jonathan Reschke, Falk Milde +1 more | 1998-12-08 |
| 5635087 | Apparatus for plasma-assisted high rate electron beam vaporization | Siegfried Schiller, Manfred Neumann | 1997-06-03 |
| 4778974 | Electron beam line evaporator | Manfred Neumann, Siegfried Schiller, Peter Unganz | 1988-10-18 |
| 4532888 | Electron-beam coating of very broad strips | Manfred Neumann, Harry Forster, Gunter Jasch, Wilfried Kunack, Martin Godenschweg +1 more | 1985-08-06 |
| 4524717 | Electron beam strip-coating apparatus | Manfred Neumann, Siegfried Schiller, Gerhard ZeiBig, Gunter Jasch | 1985-06-25 |