Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Low energy ion beam etch

Low energy ion beam etch

US Patent 9443697 · Granted Sep 13, 2016

Estimated economic value: $13,651,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Crenellated sample holder and sputter target for sample preparation in cryo elec2025
Method of material deposition2023
Method, device and system for the treatment of biological cryogenic samples by p2023
Method of producing microrods for electron emitters, and associated microrods an2023
Method of material deposition2021
Face-on, gas-assisted etching for plan-view lamellae preparation2021
Method and apparatus for the planarization of surfaces2021
Face-on, gas-assisted etching for plan-view lamellae preparation2020
Enhanced charged particle beam processes for carbon removal2019
Ion implantation to alter etch rate2019
Tomography sample preparation systems and methods with improved speed, automatio2019
Material characterization using ion channeling imaging2018