Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi charged particle beam writing apparatus, and multi charged particle beam writing method

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

US Patent 9437396 · Granted Sep 6, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for modeling of a design in reticle enhancement technology2023
Methods for modeling of a design in reticle enhancement technology2022
Charged particle beam writing apparatus and method for calculating irradiation c2019
Wireless module, electronic module, and measuring method2019
Charged particle beam writing apparatus and charged particle beam writing method2018
Multiple charged particle beam lithography apparatus and multiple charged partic2018
Charged particle beam drawing apparatus and drawing data generation method2017
Charged particle beam writing apparatus and charged particle beam writing method2017
Charged particle beam writing apparatus and charged particle beam writing method2016
Charged particle beam writing apparatus and charged particle beam writing method2015
Multi charged particle beam writing apparatus, and multi charged particle beam w2015
Charged particle beam writing apparatus and charged particle beam writing method2015