Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for precision cleaning and drying flat objects

Method for precision cleaning and drying flat objects

US Patent 9418831 · Granted Aug 16, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser dicing system for filamenting and singulating optical devices2024
Subnanometer-level light-based substrate cleaning mechanism2023
Subnanometer-level light-based substrate cleaning mechanism2023
Subnanometer-level light-based substrate cleaning mechanism2021
Subnanometer-level light-based substrate cleaning mechanism2021
Sub-nanometer-level substrate cleaning mechanism2021
Sub-nanometer-level substrate cleaning mechanism2021
Removal of process effluents2021
Removal of process effluents2021
Cleaning flat objects with a pulsed-liquid jet2020
Low volume showerhead with faceplate holes for improved flow uniformity2019
Method and apparatus for cleaning flat objects with pulsed liquid jet2019