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Subnanometer-level light-based substrate cleaning mechanism |
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Subnanometer-level light-based substrate cleaning mechanism |
Harry Christov |
2021-07-20 |
| 10985039 |
Sub-nanometer-level substrate cleaning mechanism |
Harry Christov |
2021-04-20 |
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Removal of process effluents |
Harry Christov |
2021-01-12 |
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Cleaning flat objects with a pulsed-liquid jet |
— |
2020-11-10 |
| 10179351 |
Method and apparatus for cleaning flat objects with pulsed liquid jet |
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2019-01-15 |
| 9799536 |
Apparatus and method for cleaning flat objects in a vertical orientation with pulsed liquid jet |
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2017-10-24 |
| 9418831 |
Method for precision cleaning and drying flat objects |
Basha Sajjad, Shmuel Erez, Harry Christov |
2016-08-16 |
| 9275849 |
Single-chamber apparatus for precision cleaning and drying of flat objects |
Basha Sajjad, Shmuel Erez, Harry Christov |
2016-03-01 |
| 9202725 |
Holding and rotary driving mechanism for flat objects |
Shmuel Erez, Harry Christov, Basha Sajjad |
2015-12-01 |