Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for fabricating semiconductor structure, and solid precursor delivery system

Method for fabricating semiconductor structure, and solid precursor delivery system

US Patent 9343315 · Granted May 17, 2016

Estimated economic value: $2,769,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Photoresist and method2025
In-situ deposition and densification treatment for metal-comprising resist layer2025
Image sensor having an improved structure for small pixel designs2025
Photoresist layer surface treatment, cap layer, and method of forming photoresis2025
Vertical gate field effect transistor2025
Embedded double side heating phase change random access memory (PCRAM) device an2025
Semiconductor device with tunable threshold voltage and method for manufacturing2025
Gate structures for semiconductor devices2025
Gate structures for semiconductor devices2025
Apparatus and method for manufacturing metal gate structures2025
Method for forming a contact plug by bottom-up metal growth2025
Micro spectrum chip based on units of different shapes2025