Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12281385 | Gas dispenser and deposition apparatus using the same | Chung-Liang Cheng, Wei Zhang, Wei-Jen Chen, Yen-Yu Chen | 2025-04-22 |
| 9611546 | Solid precursor delivery system | Chung-Liang Cheng, Chien-Hao Tseng, Yen-Yu Chen, Chang-Sheng Lee, Wei Zhang | 2017-04-04 |
| 9343315 | Method for fabricating semiconductor structure, and solid precursor delivery system | Chung-Liang Cheng, Chien-Hao Tseng, Yen-Yu Chen, Chang-Sheng Lee, Wei Zhang | 2016-05-17 |