Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Processing methods and apparatus with temperature distribution control

Processing methods and apparatus with temperature distribution control

US Patent 9324590 · Granted Apr 26, 2016

Estimated economic value: $5,834,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-filament heater assembly2021
Periphery purge shutter and flow control systems and methods2020
Wafer processing with carrier extension2019
Terminal for mechanical support of a heating element2018
Chemical vapor deposition flow inlet elements and methods2018
Chemical vapor deposition flow inlet elements and methods2018
Processing methods and apparatus with temperature distribution control2018
Processing methods and apparatus with temperature distribution control2018
Processing methods and apparatus with temperature distribution control2018
Density-matching alkyl push flow for vertical flow rotating disk reactors2018
Methods of wafer processing with carrier extension2018
Keyed wafer carrier2017