Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas lock device and extreme ultraviolet light generation apparatus

Gas lock device and extreme ultraviolet light generation apparatus

US Patent 9253866 · Granted Feb 2, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Anodized titanium material and method for producing the same2025
Substrate processing apparatus, and temperature control method2023
Optical apparatus2022
Target supply device, target supply method, and electronic device manufacturing 2022
Structure of connection between optical unit and optical path tube2019
Extreme ultraviolet light sensor unit and extreme ultraviolet light generation d2019
Target supply device2016
Mirror device2016
Mirror device2015
Collector mirror exchanging apparatus and method for extreme ultraviolet light s2014
Target supply device2014
Method and apparatus for cleaning collector mirror in EUV light generator2013