Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-wafer rotating disc reactor with inertial planetary drive

Multi-wafer rotating disc reactor with inertial planetary drive

US Patent 9230846 · Granted Jan 5, 2016

Estimated economic value: $4,928,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pyrano[4,3-b]indole derivatives as alpha-1-antitrypsin modulators for treating a2025
DCN-1 modulating compounds and methods of use thereof2025
Modulators of DCN-1 and methods of use thereof2025
Deposition system with integrated carrier cleaning modules2024
Micro-LED transfer methods using light-based debonding2021
Rotating disk reactor with ferrofluid seal for chemical vapor deposition2020
Wafer processing with carrier extension2019
Methods of wafer processing with carrier extension2018
Engineered substrates for use in crystalline-nitride based devices2017
Tensile separation of a semiconducting stack2016
Sectional wafer carrier2013
Process sequence for doped silicon fill of deep trenches2010