Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Etching method and plasma processing apparatus

Etching method and plasma processing apparatus

US Patent 9224616 · Granted Dec 29, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Recipe updating method2025
Member and plasma processing apparatus2021
Plasma processing method and plasma processing apparatus2020
Plasma processing method and plasma processing apparatus2018
Etching method and etching apparatus2018
Plasma processing method and plasma processing apparatus2017
Method of processing substrate and substrate processing apparatus2016
Method of etching silicon oxide film2016
Method and system for dry etching a hafnium containing material2012
Processing device, electrode, electrode plate, and processing method2011
Method and system for reducing line edge roughness during pattern etching2010
Reduced contaminant gas injection system and method of using2010