Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same

Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same

US Patent 9218994 · Granted Dec 22, 2015

Estimated economic value: $977,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for locally buffering substrate carriers in an overhead transp2011
Method and system for locally buffering substrate carriers in an overhead transp2011