Oxide sintered body and sputtering target

Assignee

• Idemitsu Kosan Co.

Inventors

• Futoshi Utsuno (27 patents)
• Kazuyoshi Inoue (81 patents)
• Hirokazu Kawashima (30 patents)
• Masashi Kasami (19 patents)
• Koki Yano (62 patents)
• Kota Terai (20 patents)

View full patent text on Google Patents →