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Home › Dispenser for chemical-mechanical polishing (CMP) apparatus, CMP apparatus having the dispenser, and CMP process using the CMP apparatus

Dispenser for chemical-mechanical polishing (CMP) apparatus, CMP apparatus having the dispenser, and CMP process using the CMP apparatus

US Patent 9205529 · Granted Dec 8, 2015

Estimated economic value: $455,000 ⓘ

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