Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9205529 | Dispenser for chemical-mechanical polishing (CMP) apparatus, CMP apparatus having the dispenser, and CMP process using the CMP apparatus | Chin-Chuan Chih, Jiann-Mo Lee, Chia-Ming Yang, Wen-Yen Chen | 2015-12-08 |