Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure apparatus, and method of manufacturing a device

Exposure apparatus, and method of manufacturing a device

US Patent 9164395 · Granted Oct 20, 2015

Estimated economic value: $36,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imprint apparatus for forming a pattern of an imprint material on a substrate-si2025
Liquid discharge apparatus and imprint apparatus2025
Display apparatus and display system2025
Electromagnetic environment analysis system, electromagnetic environment analysi2025
Light-emitting device2025
Liquid discharge apparatus, imprint apparatus, and cleaning method2025
Imprint method, imprint apparatus, and article manufacturing method2024
Polyamide resin foamed particles and method for producing same2024
Light-emitting device2024
Imprint apparatuses and article manufacturing methods applying viscosity increas2024
Input device2024
Liquid discharge device and imprint apparatus2024