Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Supporting structure and ion generator using the same

Supporting structure and ion generator using the same

US Patent 9153406 · Granted Oct 6, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ion implantation apparatus and method of cleaning ion implantation apparatus2018
Beam extraction slit structure and ion source2017
Plasma generator and thermal electron emitter2017
Antenna cover and plasma generating device using same2016
Ion generator and thermal electron emitter2016
Ion generator and ion generating method2016
Insulation structure and insulation method2016
Ion generation method and ion source2015
Ion source device and ion beam generating method2015
Insulation structure of high voltage electrodes for ion implantation apparatus2015
Ion source apparatus and cleaning optimized method thereof2011
Ion source apparatus and electronic energy optimized method therefor2006