Patterning process and resist composition

Assignee

• Shin-Etsu Chemical Co.

Inventors

• Jun Hatakeyama (570 patents)
• Koji Hasegawa (257 patents)
• Masayoshi Sagehashi (73 patents)
• Kazuhiro Katayama (61 patents)
• Kentaro Kumaki (7 patents)
• Tomohiro Kobayashi (112 patents)

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