Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vibration control apparatus, lithography apparatus, and method of manufacturing article

Vibration control apparatus, lithography apparatus, and method of manufacturing article

US Patent 9052614 · Granted Jun 9, 2015

Estimated economic value: $31,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control apparatus, imprint apparatus, and method of manufacturing article2025
Motion control apparatus, lithography apparatus, planarization apparatus, proces2024
Feedback control device that suppresses disturbance vibration using machine lear2023
Imprinting apparatus, imprinting method, method for producing article, substrate2023
Imprint method, imprint apparatus, and article manufacturing method2023
Imprint method and method for manufacturing article2022
Vibration control apparatus, lithography apparatus, and method of manufacturing 2019
Optical apparatus, projection optical system, exposure apparatus, and method of 2017
Vibration reduction apparatus, lithography apparatus and method of manufacturing2017
Vibration reduction apparatus, lithography apparatus, and method of manufacturin2017
Vibration control apparatus, lithography apparatus, and article manufacturing me2017
Optical element positioning apparatus, projection optical system and exposure ap2011