Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Adsorbent for removing metal compounds and method for same

Adsorbent for removing metal compounds and method for same

US Patent 9000201 · Granted Apr 7, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Supply system for low volatility precursors2025
Precursor supply system and precursors supply method2023
Vapor deposition of silicon-containing films using penta-substituted disilanes2017
Method of manufacturing semiconductor device, substrate processing apparatus, an2017
Method of manufacturing a semiconductor device, substrate processing apparatus a2016
Method of manufacturing semiconductor device, substrate processing apparatus, an2016
Plants having increased desiccation tolerance, increased drought tolerance or in2016
Metal heterocyclic compounds for deposition of thin films2015
Method of manufacturing semiconductor device, method of processing substrate, su2014
Metal heterocyclic compounds for deposition of thin films2014
Method of forming silicon oxide containing films2013
Bubbling supply system for stable precursor supply2013