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Home › Angled sputtering physical vapor deposition apparatus with wafer holder and wafer holder for an angled sputtering physical vapor deposition apparatus

Angled sputtering physical vapor deposition apparatus with wafer holder and wafer holder for an angled sputtering physical vapor deposition apparatus

US Patent 8986522 · Granted Mar 24, 2015

Estimated economic value: $35,000 ⓘ

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