Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and system for modifying resist openings using multiple angled ions

Method and system for modifying resist openings using multiple angled ions

US Patent 8974683 · Granted Mar 10, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Total or local thickness variation for optical devices2025
Airgap structures for improved eyepiece efficiency2025
Atomic layer deposition on optical structures2025
Shadow mask apparatus and methods for variable etch depths2025
Methods for high-resolution, stable measurement of pitch and orientation in opti2025
Methods, systems, and apparatus for inkjet printing self-assembled monoloayer (S2025
Ion implantation to modify glass locally for optical devices2025
Method of measuring efficiency for optical devices2025
High index edge blackening material2025
Methods for preparing small features on a substrate2025
Total or local thickness variation for optical devices2025
Optical device improvement2025