Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical characterization systems employing compact synchrotron radiation sources

Optical characterization systems employing compact synchrotron radiation sources

US Patent 8941336 · Granted Jan 27, 2015

Estimated economic value: $15,704,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical etendue matching methods for extreme ultraviolet metrology2024
Systems and methods for theft prevention and detection2024
Fast phase-shift interferometry by laser frequency shift2022
Methods and systems for semiconductor metrology based on polychromatic soft X-Ra2022
Inspection system with non-circular pupil2021
Threaded-connection anti-loosening locking device2020
Spectral reflectometry for in-situ process monitoring and control2019
Critical dimension uniformity enhancement techniques and apparatus2018
Techniques and systems for model-based critical dimension measurements2018
Delta die and delta database inspection2017
Particle and chemical control using tunnel flow2017
Source multiplexing illumination for mask inspection2017