Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for etching

Method and apparatus for etching

US Patent 8937017 · Granted Jan 20, 2015

Estimated economic value: $39,758,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process chamber gas flow improvements2017
Methods for etching a substrate2016
Process chamber gas flow improvements2014
Method and apparatus for etching2012