Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus and method for controlling the same

Plasma processing apparatus and method for controlling the same

US Patent 8906196 · Granted Dec 9, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing apparatus2021
Plasma processing apparatus2020
Plasma processing equipment and plasma generation equipment2019
Plasma processing apparatus with lattice-like faraday shields2019
Plasma processing apparatus2017
Plasma processing apparatus and plasma processing method2017
Plasma processing apparatus2015
Plasma processing apparatus2015
Plasma processing apparatus and method2014
Method and apparatus for plasma processing2014
Plasma etching method and plasma etching apparatus2013
Method and apparatus for plasma processing2013