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Method of determining an amount of impurities that a contaminating material contributes to high purity silicon
Method of determining an amount of impurities that a contaminating material contributes to high purity silicon
US Patent
8895324
· Granted Nov 25, 2014
Assignee
Hemlock Semiconductor
Inventors
Dennis DePesa
(1 patents)
Jon Host
(1 patents)
Troy Houthoofd
(1 patents)
Alan Rytlewski
(1 patents)
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