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Home › Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF)

Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF)

US Patent 8826198 · Granted Sep 2, 2014

Estimated economic value: $6,576,000 ⓘ

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