Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Shape measurement apparatus, and shape measurement method

Shape measurement apparatus, and shape measurement method

US Patent 8823950 · Granted Sep 2, 2014

Estimated economic value: $45,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measuring method and measuring apparatus2017
Calculation method and calculation apparatus2014
Measurement method and measurement apparatus that measure a surface figure of an2013
Measurement method and measurement apparatus that measure a surface figure of an2012
Measuring apparatus, exposure apparatus and method, and device manufacturing met2011
Exposure apparatus mounted with measuring apparatus2009
Exposure apparatus and device manufacturing method using the same2009
Method of calculating two-dimensional wavefront aberration2008
Aberration measuring apparatus for an optical system utilizing soft x-rays2006
Projection exposure apparatus and aberration measurement method2005
Projection exposure apparatus having aberration measurement device2005
Surface shape measuring apparatus and method2004