Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing a mask blank substrate, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device

Method of manufacturing a mask blank substrate, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device

US Patent 8785085 · Granted Jul 22, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Mask blank substrate, substrate with multilayer reflective film, reflective mask2025
Method for manufacturing a mask blank substrate, method for manufacturing a mask2021
Mask blank substrate, multi-layer reflective film coated substrate, and mask bla2020
Mask blank substrate, mask blank, transfer mask, and method of manufacturing sem2019
Mask blank substrate, mask blank, transfer mask, and method of manufacturing sem2017
Photomask blank, photomask blank manufacturing method, and photomask manufacturi2014
Method of manufacturing a transfer mask and method of manufacturing a semiconduc2013
Thin film evaluation method, mask blank, and transfer mask2013
Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and 2013
Method of manufacturing a substrate for a mask blank, method of manufacturing a 2013
Thin film evaluation method, mask blank, and transfer mask2013
Mask blank substrate, mask blank, photomask, and methods of manufacturing the sa2013