Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device

Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device

US Patent 10168613 · Granted Jan 1, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Mask blank substrate, substrate with multilayer reflective film, reflective mask2025
Method for manufacturing a mask blank substrate, method for manufacturing a mask2021
Mask blank substrate, multi-layer reflective film coated substrate, and mask bla2020
Mask blank substrate, mask blank, transfer mask, and method of manufacturing sem2017
Method of manufacturing a mask blank substrate, method of manufacturing a mask b2014
Photomask blank, photomask blank manufacturing method, and photomask manufacturi2014
Method of manufacturing a transfer mask and method of manufacturing a semiconduc2013
Thin film evaluation method, mask blank, and transfer mask2013
Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and 2013
Method of manufacturing a substrate for a mask blank, method of manufacturing a 2013
Thin film evaluation method, mask blank, and transfer mask2013
Mask blank substrate, mask blank, photomask, and methods of manufacturing the sa2013