Method of manufacturing GaN-based film

Assignee

• Sumitomo Electric Industries

Inventors

• Issei Satoh (20 patents)
• Yuki Seki (10 patents)
• Koji Uematsu (72 patents)
• Yoshiyuki Yamamoto (99 patents)
• Hideki Matsubara (26 patents)
• Shinsuke Fujiwara (61 patents)
• Masashi Yoshimura (73 patents)

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