Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor wafer metrology apparatus and method

Semiconductor wafer metrology apparatus and method

US Patent 8683880 · Granted Apr 1, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for determining information relating to the mass of a semicond2018
Semiconductor wafer processing methods and apparatus2017
Semiconductor wafer monitoring apparatus and method2016
Semiconductor wafer metrology apparatus and method2016
Semiconductor wafer weight metrology apparatus2016
Semiconductor wafer metrology apparatus and method2013
Measuring apparatus2012
Measuring apparatus2012
Measuring apparatus2011
Apparatus and method for investigating parameters of layers deposited on semicon2008
Apparatus and method for investigating semiconductors wafer2006
Methods and apparatus for forming a film on a substrate2003