Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for abatement of reaction products from a vacuum processing chamber

Method and apparatus for abatement of reaction products from a vacuum processing chamber

US Patent 8664560 · Granted Mar 4, 2014

Estimated economic value: $20,304,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cutting tool for band clamp2025
System and method to support in-order message processing with reactive microserv2025
Drive-through order point2020
Cooling water jet pack for high power rotary cathodes2019
Digital display mounting and lift bracket2018
Mobile wireless order point and pick-up station2018
Display enclosure with passive cooling system2018
Apparatus and methods for transporting and processing substrates2016
Cooling water jet pack for high power rotary cathodes2016
Manual switch system for outputting multimedia content to a digital sign2016
Switch system for outputting multimedia content to a digital sign2016
Continuous web apparatus and method using an air to vacuum seal and accumulator2016