Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

US Patent 8634061 · Granted Jan 21, 2014

Estimated economic value: $71,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of obtaining array of plurality of regions on substrate, exposure apparat2024
Method of obtaining array of plurality of shot regions on substrate, exposure me2024
Exposure apparatus and article manufacturing method2021
Exposure apparatus and article manufacturing method2021
Exposure apparatus and method of manufacturing device2016
Method of calculating amount of fluctuation of imaging characteristic of project2015
Projection optical system with deformable optical element, exposure apparatus, a2014
Method of calculating amount of fluctuation of imaging characteristic of project2014
Exposure apparatus and method of decreasing fluctuations in optical characterist2013
Exposure apparatus and method of manufacturing device2012
Exposure apparatus and device manufacturing method2010
Optical apparatus, method of determining position of optical element in optical 2007