Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130562 | Method of obtaining array of plurality of regions on substrate, exposure apparatus, method of manufacturing article, non-transitory storage medium, and information processing apparatus | — | 2024-10-29 |
| 11947267 | Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus | Fuma Kizu | 2024-04-02 |
| 11199784 | Exposure apparatus and article manufacturing method | Yutoku Yoshioka, Masatoshi Shimazaki | 2021-12-14 |
| 11061337 | Exposure apparatus and article manufacturing method | Koji Mikami | 2021-07-13 |
| 9116444 | Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device | Rika Takahashi | 2015-08-25 |
| 8786822 | Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method | Akihiro Yamada, Tsuyoshi Kitamura | 2014-07-22 |
| 8741510 | Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device | Rika Takahashi | 2014-06-03 |
| 8634061 | Exposure apparatus and device manufacturing method | Toshiyuki Yoshihara | 2014-01-21 |
| 8564758 | Exposure apparatus and method of decreasing fluctuations in optical characteristics of projection system | Yasuo Hasegawa, Takashi Sukegawa | 2013-10-22 |
| 7643125 | Exposure apparatus and device manufacturing method | — | 2010-01-05 |