Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293505 | Evaluation apparatus, computer-readable storage medium, evaluation method, forming system, and article manufacturing method | Koji Ishibashi, Sentaro Aihara | 2025-05-06 |
| 11947267 | Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus | Atsushi Shigenobu | 2024-04-02 |