Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article

Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article

US Patent 8597769 · Granted Dec 3, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imprint apparatus, pattern forming method, and method of manufacturing semicondu2025
Imprint method, imprint apparatus, and film formation apparatus2023
Template, patterning method, and method for manufacturing semiconductor device2023
Template, template manufacturing method, and semiconductor device manufacturing 2023
Template, template manufacturing method, and semiconductor device manufacturing 2021
Pattern forming method and imprint apparatus2020
Template substrate, method of manufacturing template substrate, and method of ma2020
Drive device and ventilation member2019
Template and method of manufacturing semiconductor device2019
Dynamic surfaces2018
Optical element material and method for producing same2017
Optical element material and method for producing same2017