Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same

Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same

US Patent 8592540 · Granted Nov 26, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reading apparatus, method of controlling reading apparatus, and non-transitory c2025
Awakening support device and awakening support method2024
Image reading apparatus including height adjustment mechanism without increasing2024
Robot2024
Wearable speaker2023
Wearable speaker2023
Wearable speaker2023
Image reading device and recording device2023
Lithium oxygen battery and electrolyte composition2021
Recording apparatus2020
Medium transporting apparatus and post-processing apparatus2020
Information presentation system, moving vehicle, information presentation method2020