Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface

Assignee

• Korea Electrotechnology Research Institute
• New Optics

Inventors

• Sung Il Chung (5 patents)
• Sergey Alexandrovich Nikiforov (1 patents)
• Hyeon Seok Oh (5 patents)
• Pan Kyeom Kim (5 patents)
• Hyeon Taeg Gim (1 patents)
• Jeong Woo Jeon (6 patents)

View full patent text on Google Patents →