Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8591711 | Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface | Sung Il Chung, Sergey Alexandrovich Nikiforov, Hyeon Seok Oh, Pan Kyeom Kim, Jeong Woo Jeon | 2013-11-26 |