Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for inspecting a surface of a substrate

Method and apparatus for inspecting a surface of a substrate

US Patent 8547545 · Granted Oct 1, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Visualization method, program for the same, visualization device, and discrimina2025
X-ray inspection method and device2019
Method and apparatus for inspecting surface of a disk2014
Method and apparatus for inspecting surface of a disk2014
Pattern inspection device of substrate surface and pattern inspection method of 2014
Method for defect determination in fine concave-convex pattern and method for de2014
Method and apparatus for inspecting patterned media disk2013
Scatterometry method and device for inspecting patterned medium2013
Magnetic device inspection apparatus and magnetic device inspection method2013
Spectral detection method and device, and defect inspection method and apparatus2012
Pattern shape inspection method and apparatus thereof2012
Disk surface inspection apparatus, inspection system thereof, and inspection met2012