Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electron-beam dimension measuring apparatus and electron-beam dimension measuring method

Electron-beam dimension measuring apparatus and electron-beam dimension measuring method

US Patent 8530836 · Granted Sep 10, 2013

Estimated economic value: $70,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Line-width measurement adjusting method and scanning electron microscope2010
Electron-beam size measuring apparatus and size measuring method with electron b2009
Sample observing apparatus and sample observing method2007
Electron beam tester, recording medium therefor and signal data detecting method2002
Electric beam tester and image processing apparatus2001
IC analysis system and electron beam probe system and fault isolation method the1997
IC tester joined with ion beam tester and the detection method of the failure pa1997
IC Analysis system and electron beam probe system and fault isolation method the1996
IC analysis system and electron beam probe system and fault isolation method the1996