Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam device, vacuum valve therefor and operation thereof

Charged particle beam device, vacuum valve therefor and operation thereof

US Patent 8502163 · Granted Aug 6, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Charged particle beam device, interchangeable multi-aperture arrangement for a c2021
Modular gas ion source2012
Gas ion source with high mechanical stability2011
Charged particle beam device with cleaning unit and method of operation thereof2008
Cooling module for charged particle beam column elements2008
Heat exchanger2007
Heater and temperature sensor array for rapid thermal processing thermal core1999
Deflection system1998
Musical score display and audio system1997
Apparatus for growing crystals1986