Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of protecting a radiation detector in a charged particle instrument

Method of protecting a radiation detector in a charged particle instrument

US Patent 8492715 · Granted Jul 23, 2013

Estimated economic value: $18,970,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for temperature control of a component2022
Method for temperature control of a component2021
Lithographic apparatus and device manufacturing method2021
Lithographic apparatus and device manufacturing method2020
Lithographic apparatus and device manufacturing method2020
Lithographic apparatus and device manufacturing method2020
Lithographic apparatus and device manufacturing method2020
Lithographic apparatus and device manufacturing method2019
Lithographic apparatus and device manufacturing method2019
Method of calibrating a reluctance actuator assembly, reluctance actuator and li2019
Substrate handling system and lithographic apparatus2019
Lithographic apparatus and device manufacturing method2019